A Decision Support System for managing Line Stops of Time Constraint Tunnels

In a High-Mix/Low-Volume (HM/LV) 300mm wafer fab, several hundred product routes are active, each with dozens of Time Constraint Tunnels (TCT), the management of which has become a real challenge. In order to help addressing the difficulties it poses, a Decision Support System (DSS) dedicated to managing Line Stops of Time Constraint Tunnels (TCT) is presented in this paper. The proposed DSS is able to detect Line Stops of TCTS, as well as exhibiting the relevant information for the management of the whole set of TCTs in a format that is understandable by a human. After a three stage integration in production, the tool industrialization has been successfully completed.

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