论文信息 - Fully integrable magnetic field sensor based on delta-E effect

Fully integrable magnetic field sensor based on delta-E effect

A fully integrable magnetic field sensor based on magnetic microelectromechanical systems is presented. The approach yields high application potential since it is compatible with standard micromachining techniques, operates at room-temperature, and provides high bandwidth and vector field capability. The demonstrator presented in this work consists of a tipless commercial atomic force microscope cantilever which is coated with an amorphous thin film layer of (Fe90Co10)78Si12B10. Amplitude and frequency of magnetic fields are measured via the modulation of the oscillation of the microcantilever via the delta-E effect of the FeCoSiB coating.

[1] Franz J. Giessibl,et al. Advances in atomic force microscopy , 2003, cond-mat/0305119.

[2] F. Raab,et al. Magnetic Position and Orientation Tracking System , 1979, IEEE Transactions on Aerospace and Electronic Systems.

[3] R. O'handley. Modern magnetic materials , 1999 .

[4] B. Rogers,et al. Improving tapping mode atomic force microscopy with piezoelectric cantilevers. , 2004, Ultramicroscopy.

[5] Y. Shimada,et al. Magnetic field sensing by an electrostrictive/magnetostrictive composite resonator , 2005, IEEE Transactions on Magnetics.

[6] Richard M. Leahy,et al. Electromagnetic brain mapping , 2001, IEEE Signal Process. Mag..

[7] R. B. Givens,et al. A microelectromechanical‐based magnetostrictive magnetometer , 1996 .

[8] M D Rossell,et al. Reversible electric control of exchange bias in a multiferroic field-effect device. , 2010, Nature materials.

[9] G. Sreenivasulu,et al. Flexural deformation in a compositionally stepped ferrite and magnetoelectric effects in a composite with piezoelectrics , 2010 .

[10] P. Sarro,et al. Magnetic-field measurements using an integrated resonant magnetic-field sensor , 1998 .

[11] B. Wagner,et al. Giant magnetoelectric coefficients in (Fe90Co10)78Si12B10-AlN thin film composites , 2010 .

[12] E. Quandt,et al. Optimization of the /spl Delta/E-effect in thin films and multilayers by magnetic field annealing , 2002 .

[13] M.R.J. Gibbs,et al. Applications of magmems , 2005 .