High-responsivity sub-bandgap hot-hole plasmonic Schottky detectors.

In this paper we present a sub-bandgap photodetector consisting of a metal grating on a thin metal patch on silicon, which makes use of the enhancement produced by the excitation of surface plasmon polaritons at the metal-silicon interface. The grating is defined via e-beam lithography and Au lift-off on a Au patch defined beforehand by optical lithography on doped p-type silicon. The surface plasmon polaritons are absorbed by the metal, leading to the creation of hot holes that can cross into the silicon where they are collected as the photocurrent. Physical characterization of intermediate structure is provided along with responsivity measurements at telecom wavelengths. Results are promising in terms of responsivity, with a value of 13 mA/W measured at 1550 nm - this is among the highest values reported to date for sub-bandgap detectors based on internal photoemission. The Schottky photodetector can be used in, e.g., non-contact wafer probing or in short-reach optical communications applications.

[1]  Jacob B. Khurgin,et al.  Plasmonic enhanced silicon pyramids for internal photoemission Schottky detectors in the near-infrared regime , 2015 .

[2]  Pierre Berini,et al.  Fabrication of a plasmonic modulator incorporating an overlaid grating coupler. , 2014, Nanotechnology.

[3]  Ivo Rendina,et al.  Critically coupled silicon Fabry-Perot photodetectors based on the internal photoemission effect at 1550 nm. , 2012, Optics express.

[4]  C. R. Crowell,et al.  Photoelectric Determination of the Image Force Dielectric Constant For Hot Electrons in Schottky Barriers , 1964 .

[5]  M.-A. Nicolet,et al.  An improved forward I-V method for nonideal Schottky diodes with high series resistance , 1984, IEEE Transactions on Electron Devices.

[6]  J. H. Werner.  Schottky barrier and pn-junctionI/V plots — Small signal evaluation , 1988 .

[7]  Huichun Liu,et al.  Surface Plasmon-Enhanced Absorption in Metal Grating Coupled Terahertz Quantum Well Photodetectors , 2012, IEEE Journal of Quantum Electronics.

[8]  Peter Nordlander,et al.  Plasmon-induced hot carrier science and technology. , 2015, Nature nanotechnology.

[9]  Pierre Berini,et al.  Surface plasmon photodetectors and their applications , 2014 .

[10]  Azzouz Sellai,et al.  Quantum efficiency in GaAs Schottky photodetectors with enhancement due to surface plasmon excitations , 2002 .

[11]  Novotny,et al.  Local Excitation, Scattering, and Interference of Surface Plasmons. , 1996, Physical review letters.

[12]  Naomi J. Halas,et al.  Photodetection with Active Optical Antennas , 2011, Science.

[13]  Pierre Berini,et al.  Plasmonic nanostructured metal-oxide-semiconductor reflection modulators. , 2015, Nano letters.

[14]  Yuya Ishii,et al.  Schottky-type surface plasmon detector with nano-slit grating using enhanced resonant optical transmission , 2014 .

[15]  Tolga Tekin,et al.  Review of Packaging of Optoelectronic, Photonic, and MEMS Components , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[16]  P. Berini.  Long-range surface plasmon polaritons , 2009 .

[17]  Robert Magnusson,et al.  Surface-plasmon mediated total absorption of light into silicon. , 2011, Optics express.

[18]  Charalambos C. Katsidis,et al.  General transfer-matrix method for optical multilayer systems with coherent, partially coherent, and incoherent interference. , 2002, Applied optics.

[19]  David J. Thomson,et al.  High-speed detection at two micrometres with monolithic silicon photodiodes , 2015, Nature Photonics.

[20]  U. Lemmer,et al.  Optimized Design of Plasmonic MSM Photodetector , 2007, IEEE Journal of Quantum Electronics.

[21]  C. Clavero,et al.  Plasmon-induced hot-electron generation at nanoparticle/metal-oxide interfaces for photovoltaic and photocatalytic devices , 2014, Nature Photonics.

[22]  Pierre Berini,et al.  Surface plasmon waveguide Schottky detector. , 2010, Optics express.

[23]  Joseph Shappir,et al.  Waveguide based compact silicon Schottky photodetector with enhanced responsivity in the telecom spectral band. , 2012, Optics express.

[24]  Langis Roy,et al.  Schottky-contact plasmonic dipole rectenna concept for biosensing. , 2013, Optics express.

[25]  Ali Kemal Okyay,et al.  Random sized plasmonic nanoantennas on Silicon for low-cost broad-band near-infrared photodetection , 2014, Scientific Reports.

[26]  Yuya Ishii,et al.  Low-loss waveguiding and detecting structure for surface plasmon polaritons , 2014 .

[27]  Ravishankar Sundararaman,et al.  Theoretical predictions for hot-carrier generation from surface plasmon decay , 2014, Nature Communications.

[28]  Pierre Berini,et al.  Thin-Film Schottky Barrier Photodetector Models , 2010, IEEE Journal of Quantum Electronics.

[29]  Lin Zhu,et al.  Efficient end-fire coupling of surface plasmons on flat metal surfaces for improved plasmonic Mach-Zehnder interferometer , 2013 .

[30]  Zhenyu Zhang,et al.  Landau damping of quantum plasmons in metal nanostructures , 2013 .

[31]  Pierre Berini,et al.  Thin Au surface plasmon waveguide Schottky detectors on p-Si , 2012, Nanotechnology.

[32]  Yoshihide Tanaka,et al.  Sensitive detection of interleukin-6 on a plasmonic chip by grating-coupled surface-plasmon-field-enhanced fluorescence imaging , 2013 .