Thin glass micro-dome structure based microlens fabricated by accurate thermal expansion of microcavities

We present an efficient fabrication technique for a glass microdome structure (GMDS) based on the microthermal expansion principle, by inflating the microcavities confined between two thin glass slides. This technique allows controlling the height, diameter, and shape of the GMDS with a uniformity under 5%. The GMDS has a high potential for the application of the microlens and lens array. This inflated hollow, thin glass structure is stable at extreme environments such as in strong acid and high temperature conditions. More importantly, the hollow microdome can be filled with liquid substances to further extend its applications. To verify our method, various GMDSs were fabricated under different process conditions, at different temperatures (540 °C–600 °C), microcavity diameters (300 μm–600 μm), glass thicknesses (120 μm–240 μm), and microcavity etching depths (25 μm–70 μm). The optical features of “empty” and “filled” microcavities were investigated. An empty microcavity functioned as a reducing lens (0.61×–0.9×) (meniscus lens), while a filled microcavity functioned as a magnifying lens (1.31×–1.65×) (biconvex lens). In addition, both lenses worked in strong acid (sulfuric acid) and high temperature (over 300 °C) conditions in which other materials of lenses cannot be used.We present an efficient fabrication technique for a glass microdome structure (GMDS) based on the microthermal expansion principle, by inflating the microcavities confined between two thin glass slides. This technique allows controlling the height, diameter, and shape of the GMDS with a uniformity under 5%. The GMDS has a high potential for the application of the microlens and lens array. This inflated hollow, thin glass structure is stable at extreme environments such as in strong acid and high temperature conditions. More importantly, the hollow microdome can be filled with liquid substances to further extend its applications. To verify our method, various GMDSs were fabricated under different process conditions, at different temperatures (540 °C–600 °C), microcavity diameters (300 μm–600 μm), glass thicknesses (120 μm–240 μm), and microcavity etching depths (25 μm–70 μm). The optical features of “empty” and “filled” microcavities were investigated. An empty microcavity functioned as a reducing lens (0....

[1]  Alan H S Chan,et al.  Effects of magnification methods and magnifier shapes on visual inspection. , 2009, Applied ergonomics.

[2]  M.C. Wu,et al.  Out-of-plane refractive microlens fabricated by surface micromachining , 1996, IEEE Photonics Technology Letters.

[3]  Jeng-Rong Ho,et al.  Fabrication of PDMS (polydimethylsiloxane) microlens and diffuser using replica molding , 2006 .

[4]  B. Yilbas,et al.  Influence of dust and mud on the optical, chemical, and mechanical properties of a pv protective glass , 2015, Scientific Reports.

[5]  P. Nussbaum,et al.  Design, fabrication and testing of microlens arrays for sensors and microsystems , 1997 .

[6]  Ching-Kong Chao,et al.  High fill-factor microlens array mold insert fabrication using a thermal reflow process , 2004 .

[7]  Jun-Bo Yoon,et al.  Fabrication of a uniform microlens array over a large area using self-aligned diffuser lithography (SADL) , 2012 .

[8]  D. J. Stevenson,et al.  Integrated optical transfection system using a microlens fiber combined with microfluidic gene delivery , 2010, Biomedical optics express.

[9]  Yo Tanaka Electric actuating valves incorporated into an all glass-based microchip exploiting the flexibility of ultra thin glass , 2013 .

[10]  P. Wolynes,et al.  On the strength of glasses , 2012, Proceedings of the National Academy of Sciences.

[11]  Zheng You,et al.  Multiplexed living cells stained with quantum dot bioprobes for multiplexed detection of single-cell array , 2013, Journal of biomedical optics.

[12]  Yo Tanaka,et al.  A Peristaltic Pump Integrated on a 100% Glass Microchip Using Computer Controlled Piezoelectric Actuators , 2014, Micromachines.

[13]  Hui Yang,et al.  Micro-optics for microfluidic analytical applications. , 2018, Chemical Society reviews.

[14]  Gerard M. O'Connor,et al.  Fabrication and characterization of microlens arrays on soda-lime glass using a combination of laser direct-write and thermal reflow techniques , 2011 .

[15]  Yaxiaer Yalikun,et al.  Ultra-thin glass sheet integrated transparent diaphragm pressure transducer , 2017 .

[16]  Luke P. Lee,et al.  Innovations in optical microfluidic technologies for point-of-care diagnostics. , 2008, Lab on a chip.

[17]  J. Choo,et al.  An optofluidic system with integrated microlens arrays for parallel imaging flow cytometry. , 2018, Lab on a chip.

[18]  R. W. Hoffman,et al.  Vacuum Physics and Technology , 1980 .

[19]  Bing Bai,et al.  Design and Fabrication of Micro Hemispheric Shell Resonator with Annular Electrodes , 2016, Sensors.

[20]  Tetsuji Yano,et al.  Fabrication of SIL array of glass by surface-tension mold technique , 2006, SPIE OPTO.

[21]  W. Verboom,et al.  Optical sensing systems for microfluidic devices: a review. , 2007, Analytica chimica acta.

[23]  Yanlin Song,et al.  Patterning liquids on inkjet-imprinted surfaces with highly adhesive superhydrophobicity. , 2016, Nanoscale.

[24]  G P Behrmann,et al.  Influence of temperature on diffractive lens performance. , 1993, Applied optics.

[25]  Tomasz S Tkaczyk,et al.  Rapid fabrication of miniature lens arrays by four-axis single point diamond machining. , 2013, Optics express.

[26]  D. Correa,et al.  Femtosecond lasers for processing glassy and polymeric materials , 2013 .

[27]  Hans Peter Herzig,et al.  Comparing glass and plastic refractive microlenses fabricated with different technologies , 2006 .

[28]  George Barbastathis,et al.  Classical imaging theory of a microlens with super-resolution. , 2013, Optics letters.

[29]  Yaxiaer Yalikun,et al.  Large-Scale Integration of All-Glass Valves on a Microfluidic Device , 2016, Micromachines.

[30]  M. Gijs,et al.  Fabrication and Characterization of Three-Dimensional Microlens Arrays in Sol-Gel Glass , 2006, Journal of Microelectromechanical Systems.

[31]  Weisong Wang,et al.  Variable-focusing microlens with microfluidic chip , 2004 .

[32]  Edoardo Charbon,et al.  Hybrid polymer microlens arrays with high numerical apertures fabricated using simple ink-jet printing technique , 2011 .

[33]  Jianbing Xie,et al.  The Application of Chemical Foaming Method in the Fabrication of Micro Glass Hemisphere Resonator , 2018, Micromachines.

[34]  R. Tsai,et al.  Crosstalk and microlens study in a color CMOS image sensor , 2003 .

[35]  Qing Yang,et al.  Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method. , 2010, Optics express.

[36]  Investigation of the occupancy ratio dependence for microlens arrays on diamond , 2018 .

[37]  Yo Tanaka,et al.  An all-glass 12 μm ultra-thin and flexible micro-fluidic chip fabricated by femtosecond laser processing. , 2016, Lab on a chip.

[38]  Jun Wang,et al.  Probes for biomolecules detection based on RET-enhanced fluorescence polarization. , 2016, Biosensors & bioelectronics.