Microdischarge arrays: a new family of photonic devices

The optical and electrical characteristics of microdischarge devices and arrays fabricated in semiconductors and metal/polymer structures are described. Devices as small as (10 /spl mu/m)/sup 2/ in emitting area (nanoliters in volume) and arrays as large as 30 /spl times/ 30 have been demonstrated and operated at gas pressures up to and exceeding one atmosphere. This new generation of microoptical sources is capable of producing photons from the infrared to the vacuum ultraviolet and beyond and is well suited for integration with microoptoelectronic, fluidic, and mechanical systems.

[1]  James Gary Eden,et al.  Planar microdischarge arrays , 1998 .

[2]  Sung-Jin Park,et al.  Multistage, monolithic ceramic microdischarge device having an active length of ∼0.27 mm , 2001 .

[3]  H. G. Slottow,et al.  Plasma displays , 1976, IEEE Transactions on Electron Devices.

[4]  J. Eden,et al.  Flexible microdischarge arrays: Metal/polymer devices , 2000 .

[5]  Konstantinos P. Giapis,et al.  Maskless etching of silicon using patterned microdischarges , 2001 .

[6]  A. M. Jorgensen,et al.  Ultraviolet transparent silicon oxynitride waveguides for biochemical microsystems. , 2001, Optics letters.

[7]  D. L. Bitzer,et al.  The plasma display panel: a digitally addressable display with inherent memory , 1899, AFIPS '66 (Fall).

[8]  Jack Chen,et al.  Silicon microdischarge devices having inverted pyramidal cathodes: Fabrication and performance of arrays , 2001 .

[9]  Sung-Jin Park,et al.  Microdischarge array-assisted ignition of a high-pressure discharge: Application to arc lamps , 2001 .

[10]  J. Eden,et al.  Excitation of a microdischarge with a reverse-biased pn junction , 2001 .

[11]  J. Eden,et al.  Performance of microdischarge devices and arrays with screen electrodes , 2001, IEEE Photonics Technology Letters.

[12]  T. Detemple,et al.  Continuous-wave emission in the ultraviolet from diatomic excimers in a microdischarge , 1998 .

[13]  T. Detemple,et al.  Microdischarge devices fabricated in silicon , 1997 .

[14]  J. Eden,et al.  Arrays of microdischarge devices having 50-100 μm square pyramidal Si anodes and screen cathodes , 2001 .