Integrated Smart Sensor Concept

In this chapter we will present a concept for implementing smart sensor interfaces [1]. Within the scope of this work we cannot discuss many types of sensors or sensor interfaces, hence we limit ourselves to two common sensor types, for measuring temperature, and for measuring pressure. This limitation does not mean that the presented matter cannot be extended to other types of sensors.

[1]  Yozo Kanda,et al.  Piezoresistance effect of silicon , 1991 .

[2]  Duane Tandeske.  Pressure Sensors: Selection and Application , 1990 .

[3]  Lis K. Nanver,et al.  DIMES-01, a baseline BIFET process for smart sensor experimentation , 1993 .

[4]  G.C.M. Meijer,et al.  A novel low-cost and accurate multiple-purpose sensor interface with continuous autocalibration , 1996, Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec.

[5]  Frank Robert Riedijk.  Integrated Smart Sensors with Digital Bus Interface , 1993 .

[6]  J. H. Huijsing,et al.  A curvature-corrected low-voltage bandgap reference , 1993 .

[7]  Werner Brockherde,et al.  Smart CMOS capacitive pressure transducer with on-chip calibration capability , 1992 .

[8]  K. Wise,et al.  Temperature sensitivity in silicon piezoresistive pressure transducers , 1983, IEEE Transactions on Electron Devices.

[9]  Paul C. de Jong,et al.  Absolute voltage amplification using dynamic feedback control , 1996 .

[10]  Johan H. Huijsing,et al.  Developments in integrated smart sensors , 1994 .

[11]  Leon O. Chua,et al.  The effect of integrator leak in Sigma - Delta modulation , 1991 .

[12]  R. F. Wollfenbuttel.  Fabrication compatibility of integrated silicon smart physical sensors , 1994 .

[13]  K. Wise,et al.  A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity , 1982, IEEE Transactions on Electron Devices.

[14]  Gerard C. M. Meijer.  Thermal sensors based on transistors , 1986 .

[15]  J. Bryzek,et al.  Silicon Sensors And Microstructures , 1991, Electro International, 1991.

[16]  T. Rogers,et al.  Selection of glass, anodic bonding conditions and material compatibility for silicon-glass capacitive sensors , 1995 .

[17]  Robert W. Adams,et al.  Design and Implementation of an Audio 18-Bit Analog-to-Digital Converter Using Oversampling Techniques , 1986 .

[18]  J. Meindl,et al.  A monolithic capacitive pressure sensor with pulse-period output , 1980, 1980 IEEE International Solid-State Circuits Conference. Digest of Technical Papers.

[19]  Randy Frank.  Pressure sensors merge micromachining and microelectronics , 1991 .

[20]  Kensall D. Wise,et al.  The coming opportunities in microsensor systems , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[21]  Rudy Van De Plassche.  Integrated analog-to-digital and digital-to-analog converters / Rudy Van De Plassche , 1994 .

[22]  A. W. van Herwaarden,et al.  Introduction to sensors compatible with microprocessors , 1990 .

[23]  S. Ansermet,et al.  Cooperative development of a piezoresistive pressure sensor with integrated signal conditioning for automotive and industrial applications , 1990 .

[24]  Johan H. Huijsing.  Signal conditioning on the sensor chip , 1986 .

[25]  Frank Robert Riedijk,et al.  A general circuit for resistive bridge sensors with bus compatible output , 1996, Quality Measurement: The Indispensable Bridge between Theory and Reality (No Measurements? No Science! Joint Conference - 1996: IEEE Instrumentation and Measurement Technology Conference and IMEKO Tec.

[26]  E. C. Dijkmans,et al.  Low Signal-Level Distortion in Sigma-Delta Modulators , 1988 .