Molecular Beam Epitaxial Growth Of Silicon Devices

Silicon growth by Molecular Beam Epitaxy has great advantages for device fabrication. It can readily provide doping profiles with arbitrary and complex shapes, in any sequence, with abrupt transitions without smearing or compensation. Excellent depth and doping control results for layer thickness down to a few angstroms. Examples are shown of profiles that have already been grown for varactor diodes, avalanche and tunnel diodes, a low barrier Schottky diode and an n-p-n bipolar transistor.