Mechanically coupled comb drive MEMS stages
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H. Urey | S. Holmstrom | H. Urey | S. Holmstrom | K. Hedsten | Ç. Ataman | A. Arslan | H. Rahmi Seren | P. Enoksson | C. Ataman | A. Arslan | K. Hedsten | H. Rahmi Seren | P. Enoksson
[1] A. Yalçinkaya,et al. Two-axis electromagnetic microscanner for high resolution displays , 2006, Journal of Microelectromechanical Systems.
[2] Hakan Urey,et al. Design and optimization of microlens array based high resolution beam steering system. , 2007, Optics express.