Innovative High-Precision Position Sensor Systems for Robotic and Automotive Applications
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C. Boese | Stephanus Büttgenbach | M. R. Kirchhoff | J. Guttler | M. Feldmann | M. R. Kirchhoff | S. Büttgenbach | M. Feldmann | C. Boese | J. Guttler
[1] S. Büttgenbach,et al. Design, fabrication and characterization of a micro-fluxgate intended for parallel robot application , 2009, Microtechnologies.
[2] S. Büttgenbach,et al. Electromagnetic micro-actuators, micro-motors, and micro-robots , 2007, SPIE Micro + Nano Materials, Devices, and Applications.
[3] E. Obermeier,et al. Design and fabrication of 2D Lorentz force actuated micromirrors , 2002, IEEE/LEOS International Conference on Optical MEMs.
[4] Stephanus Büttgenbach,et al. Revised fabrication process for micro-fluxgate-magnetometers , 2008 .
[5] Stephanus Büttgenbach,et al. Application of UV depth lithography in micro system technology , 2008 .
[6] Juergen Hesselbach,et al. Passive-joint sensors for parallel robots , 2005 .