论文信息 - Study of high In-content AlInN deposition on p-Si(111) by RF-sputtering - 字舞流文

Study of high In-content AlInN deposition on p-Si(111) by RF-sputtering

M. González-Herráez | E. Monroy | F. Naranjo | A. Núñez-Cascajero | S. Valdueza-Felip | C. Navío | L. Monteagudo-Lerma