Numerical investigation of magnetic field effect on pressure in cylindrical and hemispherical silicon CZ crystal growth

The effect of axial magnetic field of different intensities on pressure in silicon Czochralski crystal growth is investigated in cylindrical and hemispherical geometries with rotating crystal and crucible and thermocapillary convection. As one important thermodynamic variable, the pressure is found to be more sensitive than temperature to magnetic field with strong dependence upon the vorticity field. The pressure at the triple point is proposed as a convenient parameter to control the homogeneity of the grown crystal. With a gradual increase of the magnetic field intensity the convection effect can be reduced without thermal fluctuations in the silicon melt. An evaluation of the magnetic interaction parameter critical value corresponding to flow, pressure and temperature homogenization leads to the important result that a relatively low axial magnetic field is required for the spherical system comparatively to the cylindrical one.

[1]  M. Albrecht,et al.  The use of heater-magnet module for Czochralski growth of PV silicon crystals with quadratic cross section , 2011 .

[2]  P. Rudolph,et al.  Numerical studies of flow patterns during Czochralski growth of square-shaped Si crystals , 2011 .

[3]  N. Jekabsons,et al.  Applicability of LES turbulence modeling for CZ silicon crystal growth systems with traveling magnetic field , 2010 .

[4]  A. Alemany,et al.  Three‐dimensional study of the pressure field and advantages of hemispherical crucible in silicon Czochralski crystal growth , 2010 .

[5]  S. Dost,et al.  Silicon transport under rotating and combined magnetic fields in liquid phase diffusion growth of SiGe , 2010 .

[6]  A. Alemany,et al.  Forced and thermocapillary convection in silicon Czochralski crystal growth in semispherical crucible , 2010 .

[7]  David Rubin,et al.  Introduction to Continuum Mechanics , 2009 .

[8]  A. Alemany,et al.  Combined effects of crucible geometry and Marangoni convection on silicon Czochralski crystal growth , 2009 .

[9]  B. Nacke,et al.  Convective phenomena in large melts including magnetic fields , 2007 .

[10]  K. Kakimoto,et al.  3D global analysis of CZ‐Si growth in a transverse magnetic field with rotating crucible and crystal , 2005 .

[11]  Y. Hashimoto,et al.  Heat and oxygen transfer in silicon melt in an electromagnetic Czochralski system with transverse magnetic fields , 2005 .

[12]  Wolfgang Voigt,et al.  Crystal Research and Technology , 1987, August.

[13]  K. Schatten Magnetic convection , 1973, Solar Physics.

[14]  A. Witt,et al.  Czochralski-type crystal growth in transverse magnetic fields , 1970 .

[15]  G. Müller,et al.  Crystal growth : from fundamentals to technology , 2004 .

[16]  R. Moreau The fundamentals of MHD related to crystal growth , 1999 .

[17]  ScienceDirect Progress in crystal growth and characterization , 1989 .