Simple microflight mechanism on silicon wafer

Flying is an advantageous method of mobility for a microscale machine due to the scale effect. Insects have evolved through natural selection, so they have fascinating structures and functions which are good models for a micromachine, especially in regard to microflight. A flying micromechanism is discussed, including its structure, actuators, power supply, and dynamics. One such 3D flying mechanism microstructure has been made.