High speed monolithically integrated metal-semiconductor-metal waveguide detector on InP

Many optical processing functions in future broadband optical communication systems are best realized by manipulating the optical signals in semiconductor waveguides. For such signal processing, fast efficient signal detection is best achieved using a photodetector monolithically integrated with the waveguide. PIN1-4 and, more recently, MSM5 waveguide detectors have been reported. We report the realization of a fast InGaAs MSM Schottky barrier photodetector monolithically integrated with an InP/InGaAsP/ InP ridge waveguide for application in the 1.3- and 1.55-μm fiber bands. Pulse response widths (FWHM) of 77 ps were recorded, the lowest value reported to date for any semiconductor waveguide photodetector.