Microscale Modeling and Simulation

The Microsystems Subgrid Physics project is intended to address gaps between developing high-performance modeling and simulation capabilities and microdomain specific physics. The initial effort has focused on incorporating electrostatic excitations, adhesive surface interactions, and scale dependent material and thermal properties into existing modeling capabilities. Developments related to each of these efforts are summarized, and sample applications are presented. While detailed models of the relevant physics are still being developed, a general modeling framework is emerging that can be extended to incorporate evolving material and surface interaction modules.

[1]  T. Borca-Tasciuc,et al.  Thermal Conductivity and Heat Transfer in Superlattices , 1997 .

[2]  M. Asheghi,et al.  Thermal conduction in doped single-crystal silicon films , 2002 .

[3]  A. Needleman.  An analysis of tensile decohesion along an interface , 1990 .

[4]  T. Higuchi,et al.  Micro impact drive mechanisms using optically excited thermal expansion , 1997 .

[5]  A. Majumdar.  Microscale Heat Conduction in Dielectric Thin Films , 1993 .

[6]  Ronald L. Rivest,et al.  Introduction to Algorithms , 1990 .

[7]  J. J. Sniegowski,et al.  Surface Micromachined Microengane As The Driver For Micromechanical Gears , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[8]  P. Klemens.  Thermal Conductivity and Lattice Vibrational Modes , 1958 .

[9]  J. R. Torczynski,et al.  A Lattice-Boltzmann Method for Partially Saturated Computational Cells , 1998 .

[10]  P. Geubelle,et al.  Impact-induced delamination of composites: A 2D simulation , 1998 .

[11]  M. Ortiz,et al.  Computational modelling of impact damage in brittle materials , 1996 .

[12]  Jeremy A. Walraven,et al.  Characterization of an inchworm actuator fabricated by polysilicon surface micromachining , 2001, SPIE MOEMS-MEMS.

[13]  James M. Redmond,et al.  Integrated modeling and testing of a micro hinged structure for sliding friction measurement , 1998 .

[14]  Bishop Dj,et al.  The rise of optical switching. , 2001 .

[15]  G Chen,et al.  Ballistic-diffusive heat-conduction equations. , 2001, Physical review letters.

[16]  D. S. Dugdale.  Yielding of steel sheets containing slits , 1960 .

[17]  L. Warne,et al.  Electrophysics of micromechanical comb actuators , 1995 .

[18]  Jack W. Judy,et al.  Magnetic microactuation of polysilicon flexure structures , 1995 .

[19]  Gang Chen,et al.  Thermal Conductivity and Heat Transfer in Superlattices , 1997 .

[20]  Sunil Saigal,et al.  Polymer interfacial fracture simulations using cohesive elements , 1999 .

[21]  Kenneth E. Goodson,et al.  Sub-Continuum Simulations of Heat Conduction in Silicon-on-Insulator Transistors , 1999, Heat Transfer: Volume 3.

[22]  Kenneth E. Goodson,et al.  Measurement of ballistic phonon conduction near hotspots in silicon , 2001 .

[23]  G. I. Barenblatt.  THE MATHEMATICAL THEORY OF EQUILIBRIUM CRACKS IN BRITTLE FRACTURE , 1962 .

[24]  Guyer Ra.  Phonon gas: A lattice Boltzmann description. , 1994 .