论文信息 - Electrostatically-Driven-Leverage Actuator as an Engine for Out-of-plane Motion

Electrostatically-Driven-Leverage Actuator as an Engine for Out-of-plane Motion

An Electrostatically-Driven-Leverage actuator (EDLA Engine) is proposed as an elementary actuation unit for out-of-plane motion. The EDLA Engine consists of a near-gap electrode and a rigid lever-mechanism. The lever-mechanism magnify the motion of the electrode; thus, the EDLA Engine has a large displacement (>15µm) and a low driving voltage (<25Volt). To improve the performances of EDLA Engine, the shape of electrodes was modified and air exhaust grooves was added on the substrate. Since the EDLA Engine can be integrated with passive elements for various applications, it is regarded as a universal out-of-plane engine.

Weileun Fang | Ruey-Shing Huang | Hung-Yi Lin | Hsin-Hwa Hu

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