Accessibility of cylindrical channels within patterned mesoporous silica films using nanoparticle diffusion

Mesoporous silica films with well ordered nanochannels (approximately 7 nm in diameter) oriented parallel to the substrate were synthesized using supercritical carbon dioxide mediated silica deposition within templates comprised of triblock copolymers blended with strongly associating homopolymers. The films were patterned at the device level by conventional lithography and etched to yield periodic circular features approximately 20 µm in diameter. The nanoscale channels remained accessible to penetrant diffusion as shown by dye uptake experiments. The nanochannel arrays were used as miniature size exclusion columns to mediate nanoparticle diffusion.

[1]  Plinio Innocenzi,et al.  Patterning Techniques for Mesostructured Films , 2008 .

[2]  C. Ober,et al.  Simple fabrication of micropatterned mesoporous silica films using photoacid generators in block copolymers , 2008 .

[3]  C. Ober,et al.  An Efficient Route to Mesoporous Silica Films with Perpendicular Nanochannels , 2008 .

[4]  B. Gorman,et al.  Mesoporous Silica Films with Long-Range Order Prepared from Strongly Segregated Block Copolymer/Homopolymer Blend Templates , 2007 .

[5]  H. Amenitsch,et al.  Highly Ordered Self-Assembled Mesostructured Hafnia Thin Films: An Example of Rewritable Mesostructure , 2006 .

[6]  J. Baumard,et al.  Ink Jet Printing of Microdot Arrays of Mesostructured Silica , 2006 .

[7]  J. Watkins,et al.  Synthesis of Mesoporous Organosilicate Films in Supercritical Carbon Dioxide , 2006 .

[8]  G. Whitesides,et al.  New approaches to nanofabrication: molding, printing, and other techniques. , 2005, Chemical reviews.

[9]  B. Bauer,et al.  Characterization of Ordered Mesoporous Silica Films Using Small-Angle Neutron Scattering and X Ray Porosimetry , 2005 .

[10]  Vincent M Rotello,et al.  Tunable reactivation of nanoparticle-inhibited beta-galactosidase by glutathione at intracellular concentrations. , 2004, Journal of the American Chemical Society.

[11]  Archita Sengupta,et al.  Mesoporous Silicates Prepared Using Preorganized Templates in Supercritical Fluids , 2004, Science.

[12]  Galo J. A. A. Soler-Illia,et al.  Humidity-controlled mesostructuration in CTAB-templated silica thin film processing. The existence of a modulable steady state , 2003 .

[13]  A. Stein.  Advances in Microporous and Mesoporous Solids—Highlights of Recent Progress , 2003 .

[14]  A. Parikh,et al.  Photochemical Pattern Transfer and Enhancement of Thin Film Silica Mesophases , 2003 .

[15]  M. Verheijen,et al.  Structural characterization of mesoporous organosilica films for ultralow-k dielectrics , 2003 .

[16]  Ming C. Wu,et al.  Micromachining of mesoporous oxide films for microelectromechanical system structures , 2002 .

[17]  Mark E. Davis.  Ordered porous materials for emerging applications , 2002, Nature.

[18]  G. Stucky,et al.  Mesostructured materials for optical applications: from low-k dielectrics to sensors and lasers. , 2001, Spectrochimica acta. Part A, Molecular and biomolecular spectroscopy.

[19]  H. Sugimura,et al.  Micropatterned Silica Films with Ordered Nanopores Fabricated through Photocalcination , 2001 .

[20]  H. Sugimura,et al.  Controlled Growth of Mesostructured Organic–Inorganic Composite Films on Oxide Substrates Defined with Micrometer‐Scale Dimensions , 2001 .

[21]  G. López,et al.  Self-assembly of mesoscopically ordered chromatic polydiacetylene/silica nanocomposites , 2001, Nature.

[22]  Thomas A. Baer,et al.  Hierarchically Structured Functional Porous Silica and Composite Produced by Evaporation-Induced Self-Assembly , 2001 .

[23]  G. Whitesides,et al.  Patterning Porous Oxides within Microchannel Networks , 2001 .

[24]  J. D. Ruiz,et al.  A new application of UV-ozone treatment in the preparation of substrate-supported, mesoporous thin films , 2000 .

[25]  B. G. Potter,et al.  Optically defined multifunctional patterning of photosensitive thin-film silica mesophases. , 2000, Science.

[26]  Yunfeng Lu,et al.  Rapid prototyping of patterned functional nanostructures , 2000, Nature.

[27]  Stucky,et al.  Mirrorless lasing from mesostructured waveguides patterned by soft lithography , 2000, Science.

[28]  C. Mirkin.  Tweezers for the Nanotool Kit , 1999, Science.

[29]  Hong,et al.  Multiple ink nanolithography: toward a multiple-Pen nano-plotter , 1999, Science.

[30]  Yunfeng Lu,et al.  Evaporation-Induced Self-Assembly: Nanostructures Made Easy** , 1999 .

[31]  Xu,et al.  "Dip-Pen" nanolithography , 1999, Science.

[32]  Deng,et al.  Hierarchically ordered oxides , 1998, Science.

[33]  G. Whitesides,et al.  Microscopic patterning of orientated mesoscopic silica through guided growth , 1997, Nature.

[34]  Avelino Corma,et al.  From Microporous to Mesoporous Molecular Sieve Materials and Their Use in Catalysis. , 1997, Chemical reviews.

[35]  R. G. Freeman,et al.  Preparation and Characterization of Au Colloid Monolayers , 1995 .