论文信息 - Design and technology of copper comb capacitors

Design and technology of copper comb capacitors

The article presents the construction and technology of comb capacitors on a polycarbonate substrates. The structures have been designed to be used in the ECIS measurement system that allows monitoring the activity of the examined cells by analyzing the changing electrical parameters impedance, resistance and capacitance in real time. The copper layer was embedded by sputtering method. The resulting comb capacitors were used in a test sample of substances with different chemical properties.

[1] G. R. Van de Walle,et al. Electric Cell-Substrate Impedance Sensing To Monitor Viral Growth and Study Cellular Responses to Infection with Alphaherpesviruses in Real Time , 2017, mSphere.

[2] Ellis Meng,et al. Materials for microfabricated implantable devices: a review. , 2015, Lab on a chip.

[3] C. Renken,et al. Impedance analysis of GPCR-mediated changes in endothelial barrier function: overview and fundamental considerations for stable and reproducible measurements , 2015, Pflügers Archiv - European Journal of Physiology.

[4] J. Luong. An Emerging Impedance Sensor Based on Cell-Protein Interactions: Applications in Cell Biology and Analytical Biochemistry , 2003 .

[5] C.R. Keese,et al. A biosensor that monitors cell morphology with electrical fields , 1994, IEEE Engineering in Medicine and Biology Magazine.

[6] Daniel C. Edelstein,et al. Copper Metallization for High Performance Silicon Technology , 2000 .

[7] E. McAdams,et al. The linear and non-linear electrical properties of the electrode-electrolyte interface , 1995 .

[8] Effect of exopolysaccharide from Ganoderma applanatum on the electrical properties of mouse fibroblast cells line L929 culture using an electric cell-substrate impedance sensing (ECIS) - Preliminary study. , 2016, Annals of agricultural and environmental medicine : AAEM.