Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces

An electrostatic chuck (ESC) is a type of reversible dry adhesive which clamps objects by means of electrostatic force. Currently an ESC is used only for objects having flat surfaces because the attractive force is reduced for rough surfaces. An ESC that can handle objects with rough surfaces will expand its applications to MEMS (micro electro mechanical system) or optical parts handling. An ESC consisting of compliant electrostatic inductive fibers which conform to the profile of the surface has been proposed for such use. This paper aims at furthering previous research by observing the attractive force/pressure generated, both theoretically and experimentally, through step-by-step fabrication and analysis. Additionally, how the proposed fiber ESC behaves toward rough surfaces is also observed. The attractive force/pressure of the fiber ESC is theoretically investigated using a robust mechano-electrostatic model. Subsequently, a prototype of the fiber ESC consisting of ten fibers arranged at an angle is employed to experimentally observe its attractive force/pressure for objects with rough surfaces. The attractive force of the surface which is modeled as a sinusoidal wave with various amplitudes is observed, through which the feasibility of a fiber ESC is justified.

[1]  K. Yatsuzuka,et al.  Fundamental characteristics of electrostatic wafer chuck with insulating sealant , 1998, Conference Record of 1998 IEEE Industry Applications Conference. Thirty-Third IAS Annual Meeting (Cat. No.98CH36242).

[2]  D. R. Wright,et al.  Manufacturing issues of electrostatic chucks , 1995 .

[3]  E. A. Soares,et al.  Advances on surface structural determination by LEED , 2011, Journal of physics. Condensed matter : an Institute of Physics journal.

[4]  Bharat Bhushan,et al.  Surface characterization and friction of a bio-inspired reversible adhesive tape , 2006 .

[5]  Kahp Y. Suh,et al.  Stooped Nanohairs: Geometry‐Controllable, Unidirectional, Reversible, and Robust Gecko‐like Dry Adhesive , 2009 .

[6]  Allen McTeer,et al.  Wafer dependence of Johnsen–Rahbek type electrostatic chuck for semiconductor processes , 2007 .

[7]  Aaron Parness,et al.  A microfabricated wedge-shaped adhesive array displaying gecko-like dynamic adhesion, directionality and long lifetime , 2009, Journal of The Royal Society Interface.

[8]  Xiaofan Luo,et al.  A thermally responsive, rigid, and reversible adhesive , 2010 .

[9]  A. Geim,et al.  Microfabricated adhesive mimicking gecko foot-hair , 2003, Nature materials.

[10]  S. Gorb,et al.  Biomimetic mushroom-shaped fibrillar adhesive microstructure , 2007, Journal of The Royal Society Interface.

[11]  Eduard Arzt,et al.  Gecko‐Inspired Surfaces: A Path to Strong and Reversible Dry Adhesives , 2010, Advanced materials.

[12]  R. Mohondro,et al.  CHARACTERIZING COAT, BAKE, AND DEVELOP PROCESSES , 1993 .

[13]  Alfred J. Crosby,et al.  Surface Wrinkles for Smart Adhesion , 2008 .

[14]  Ronald S. Fearing,et al.  Synthetic gecko foot-hair micro/nano-structures as dry adhesives , 2003 .

[15]  Wan Kyun Chung,et al.  Unscented FastSLAM: A Robust and Efficient Solution to the SLAM Problem , 2008, IEEE Transactions on Robotics.

[16]  Shigeki Saito,et al.  Addendum: Compliant electrostatic chuck based on hairy microstructure (2013 Smart Mater. Struct. 22 015019) and Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces (2013 Smart Mater. Struct. 22 095010) , 2014 .

[17]  S. Kanno,et al.  Generation mechanism of residual clamping force in a bipolar electrostatic chuck , 2003 .

[18]  Metin Sitti,et al.  Reversible dry micro-fibrillar adhesives with thermally controllable adhesion , 2009 .

[19]  Shigeki Saito,et al.  Geckos' foot hair structure and their ability to hang from rough surfaces and move quickly , 2006 .