A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments

This paper presents a passive wireless sensor for simultaneously and remotely measuring pressure and temperature under harsh environments. The sensor consists of a dual <inline-formula> <tex-math notation="LaTeX">$LC$ </tex-math></inline-formula> (inductor and capacitor) resonant circuit, one without a cavity and the other with a cavity capacitor for temperature and pressure sensing, respectively. The low-temperature co-fired ceramic technology is used to fabricate the sensor, making it suitable for high-temperature harsh environment operations. Experimental results show the prototype sensor has temperature sensitivity of 8.15 kHz/°C and pressure sensitivity of 1.96 MHz/Bar up to 400°C. [2016-0157]

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