论文信息 - Study of Hf-Ti-O Thin Film as High-k Gate Dielectric and Application for ETSOI MOSFETs - 字舞流文

Study of Hf-Ti-O Thin Film as High-k Gate Dielectric and Application for ETSOI MOSFETs

Jiang Yan | Jun Du | Y. Xiong | F. Wei | Xiaoqiang Chen | Hongbin Zhao | Zhaoyun Tang | Bo Tang