Design, Process Development and Fabrication of SU-8 based CMOS Compatible Capacitive MEMS Platform for Bio-sensing Applications

Bio sensors are integrated devices which could provide information about the composition of Biological samples (semi) quantitatively. The key element of Bio sensors are their transducers which are usually Micro or Nano scale structures with Biological recognition elements as part of them. Realization of a practical and usable Bio sensor involves a wide range of interdisciplinary activities. The emerging interdisciplinary fields of Nanotechnology and Nano fabrication has helped the heterogeneous integration of Biology with Engineering systems which was not possible earlier.