论文信息 - Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy - 字舞流文

Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy

P. Neudeck | M. Skowronski | M. Dudley | J. Powell | A. J. Trunek | W. Vetter | D. Spry | X. Huang | J. Liu