Hyperelastic pressure sensing with a liquid-embedded elastomer

A hyperelastic pressure transducer is fabricated by embedding silicone rubber with microchannels of conductive liquid eutectic gallium–indium. Pressing the surface of the elastomer with pressures in the range of 0–100 kPa will deform the cross-section of underlying channels and change their electric resistance by as much as 50%. Microchannels with dimensions as small as 25 µm are obtained with a maskless, soft lithography process that utilizes direct laser exposure. Change in electrical resistance is measured as a function of the magnitude and area of the surface pressure as well as the cross-sectional geometry, depth and relative lateral position of the embedded channel. These experimentally measured values closely match closed-form theoretical predictions derived from plane strain elasticity and contact mechanics.

[1]  S. Timoshenko,et al.  Theory of elasticity , 1975 .

[2]  Whitney Rj.  The measurement of changes in human limb-volume by means of a mercury-inrubber strain gauge. , 1949 .

[3]  G. Whitesides,et al.  Soft Lithography. , 1998, Angewandte Chemie.

[4]  G. Whitesides,et al.  Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane). , 1998, Analytical chemistry.

[5]  P. C. Paris,et al.  The Stress Analysis of Cracks Handbook, Third Edition , 2000 .

[6]  S. Quake,et al.  From micro- to nanofabrication with soft materials. , 2000, Science.

[7]  S. Quake,et al.  Monolithic microfabricated valves and pumps by multilayer soft lithography. , 2000, Science.

[8]  Hiroshi Tada,et al.  The stress analysis of cracks handbook , 2000 .

[9]  Russell Chung,et al.  Direct writing of electronic and sensor materials using a laser transfer technique , 2000 .

[10]  Zamora,et al.  Electronic textiles: a platform for pervasive computing , 2003, Proceedings of the IEEE.

[11]  R. Fabian Pease,et al.  Maskless lithography , 2005 .

[12]  Hiroyuki Shinoda,et al.  Robot skin based on touch-area-sensitive tactile element , 2006, Proceedings 2006 IEEE International Conference on Robotics and Automation, 2006. ICRA 2006..

[13]  J. Rogers,et al.  A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates , 2006, Science.

[14]  Yasutoshi Makino,et al.  Large Area Sensor Skin based on Two-Dimensional Signal Transmission Technology , 2007, Second Joint EuroHaptics Conference and Symposium on Haptic Interfaces for Virtual Environment and Teleoperator Systems (WHC'07).

[15]  Yasuo Kuniyoshi,et al.  A highly stretchable tactile distribution sensor for smooth surfaced humanoids , 2007, 2007 7th IEEE-RAS International Conference on Humanoid Robots.

[16]  Yonggang Huang,et al.  Stretchable and Foldable Silicon Integrated Circuits , 2008, Science.

[17]  G. Whitesides,et al.  Eutectic Gallium‐Indium (EGaIn): A Liquid Metal Alloy for the Formation of Stable Structures in Microchannels at Room Temperature , 2008 .

[18]  B. Ziaie,et al.  A multiaxial stretchable interconnect using liquid-alloy-filled elastomeric microchannels , 2008 .

[19]  Veronica J. Santos,et al.  Biomimetic Tactile Sensor Array , 2008, Adv. Robotics.

[20]  Yonggang Huang,et al.  A curvy, stretchy future for electronics , 2009, Proceedings of the National Academy of Sciences.

[21]  D. Cotton,et al.  A Multifunctional Capacitive Sensor for Stretchable Electronic Skins , 2009, IEEE Sensors Journal.

[22]  Masayuki Inaba,et al.  Development of soft stretchable knit sensor for humanoids' whole-body tactile sensibility , 2009, 2009 9th IEEE-RAS International Conference on Humanoid Robots.

[23]  Paolo Dario,et al.  Development of a stretchable skin-like tactile sensor based on polymeric composites , 2009, 2009 IEEE International Conference on Robotics and Biomimetics (ROBIO).

[24]  Abraham P. Lee,et al.  A slow-adapting microfluidic-based tactile sensor , 2009 .

[25]  Isao Shimoyama,et al.  Stretchable liquid tactile sensor for robot-joints , 2010, 2010 IEEE International Conference on Robotics and Automation.

[26]  Clément Gosselin,et al.  Characterization of the electrical resistance of carbon-black-filled silicone: Application to a flexible and stretchable robot skin , 2010, 2010 IEEE International Conference on Robotics and Automation.

[27]  Andrew G. Gillies,et al.  Nanowire active-matrix circuitry for low-voltage macroscale artificial skin. , 2010, Nature materials.

[28]  Robert J. Wood,et al.  Applicability of Shape Memory Alloy Wire for an Active, Soft Orthotic , 2011, Journal of Materials Engineering and Performance.

[29]  M. Dickey,et al.  Reversibly Deformable and Mechanically Tunable Fluidic Antennas , 2022 .