PROTEUS. Fortran Program to Solve 2-D Continuum Equations for Chemically Reacting Plasma

PROTEUS is a FORTRAN program that solves 2-d continuum equations for chemically reacting plasma flow including electron, ion, and neutral transport, plasma generation, and plasma-surface kinetics, for modeling inductively coupled plasma reactors. PROTEUS consists of three primary modules: a charged species transport module, a neutral species transport module, and an electromagnetic field solver module. these modules are referred to as INDUCT, CURRENT, and ORMAX, respectively. The modules are all written in FORTRAN and have been designed for and tested on UNIX workstations. PROTEUS also includes interfaces to CHEMKIN III and SURFACE CHEMKIN III for general descriptions of plasma and surface kinetics.