论文信息 - Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivity - 字舞流文

Sub-30 keV patterning of HafSOx resist: Effects of voltage on resolution, contrast, and sensitivity

David C. Johnson | K. C. Fairley | Meredith C. Sharps | Gavin Mitchson | J. Ditto | Darren W. Johnson