Mixing in a 220MHz CMOS-MEMS

This paper describes the frequency mixing operation of a micro electro mechanical system device designed and fabricated in a CMOS commercial technology (AMS 0.35mum). The theory of the MEMS is summarized and a CMOS fully integrated MEMS is characterized as a mixer. The designed MEMS is a polysilicon clamped-clamped beam that presents a resonance frequency in the VHF range. CMOS-MEMS based mixer limitations are treated and a technique based on differential amplification to improve performance is given.

[1]  Fang Chen,et al.  CMOS-MEMS resonant RF mixer-filters , 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

[2]  C. Nguyen,et al.  Mechanically corner-coupled square microresonator array for reduced series motional resistance , 2003 .

[3]  Ark-Chew Wong,et al.  Micromechanical Mixer+Filters , 1998 .

[4]  S.M. Kuo,et al.  Motorola MEMS switch technology for high frequency applications , 2001, 2001 Microelectromechanical Systems Conference (Cat. No. 01EX521).

[5]  Humberto Campanella,et al.  A read-out strategy and circuit design for high frequency MEMS resonators , 2005, 2005 IEEE International Symposium on Circuits and Systems.

[6]  Hector J. De Los Santos,et al.  RF MEMS Circuit Design for Wireless Communications , 2002 .

[7]  G. Abadal,et al.  VHF CMOS-MEMS resonator monolithically integrated in a standard 0.35μm CMOS technology , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).

[8]  G. Abadal,et al.  Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications , 2006, IEEE Electron Device Letters.

[9]  Ark-Chew Wong,et al.  Micromechanical mixer and filters , 1998, International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217).

[10]  C. Nguyen,et al.  High-Q UHF micromechanical radial-contour mode disk resonators , 2005, Journal of Microelectromechanical Systems.

[11]  Ark-Chew Wong,et al.  Micromechanical mixer-filters ("mixlers") , 2004, Journal of Microelectromechanical Systems.

[12]  Cam Nguyen.  Towards LSI Vibrating Micromechanical Signal Processors , 2006 .

[13]  C. Nguyen,et al.  Frequency-selective MEMS for miniaturized low-power communication devices , 1999 .