Cascadable RF MEMS switched capacitors for 0.1–2 GHz applications

This paper presents an RF MEMS switched-capacitor suitable for VHF and UHF tunable filters and reconfigurable matching networks. The device is based on a symmetric circular beam geometry that results in low-series-inductance compact device arrays for high-value capacitances. Device arrays are shown with down-state capacitances ranging from 11.22 to 17.49 pF, with associated impedances of 144-7 Ω and 91-4 Ω at 100–2000 MHz. The impedances vary with frequency as 1/ω over a 20:1 frequency range. The measured Q is greater than 50 in the VHF range.

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