Theoretical modeling, experiments and optimization of piezoelectric multimorph

This paper deals with the static and dynamic electromechanical responses of piezoelectric layered structures (multimorphs). Based on the Bernoulli?Euler plate model including the dynamics of piezoelectric, electrode and substrate layers, we obtain the natural frequencies, maximum displacement and resultant force of a symmetric cantilevered multimorph. The proposed theoretical model is verified by experiments using a 20-layered PZT (plumbum?zirconate?titanate) multimorph, and it is compared to the conventional bimorph model. Experimental results agree with the analytical predictions on the natural frequencies and vertical displacement. With the analytical solution for multimorph, we investigate the effects of the layer number and the layer thickness on natural frequency, maximum deflection and output force. It is found that there exists an optimum number of piezoelectric layers to maximize the transverse deflection. There also exists a specific value of the thickness ratio between piezoelectric and structure layers to maximize both the tip deflection and force.

[1]  A. Ugural.  Stresses in plates and shells , 1981 .

[2]  Paul Muralt,et al.  Ferroelectric thin films for micro-sensors and actuators: a review , 2000 .

[3]  C.C. Chou,et al.  Electromechanical analysis of an asymmetric piezoelectric/elastic laminate structure: theory and experiment , 1999, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[4]  Michael Krommer,et al.  On the correction of the Bernoulli-Euler beam theory for smart piezoelectric beams , 2001 .

[5]  N. Rogacheva,et al.  Electromechanical analysis of a symmetric piezoelectric/elastic laminate structure: theory and experiment , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[6]  Weiguang Zhu,et al.  Exact solution of multilayered piezoelectric diaphragms , 2003, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[7]  Ellad B. Tadmor,et al.  Electromechanical coupling correction for piezoelectric layered beams , 2003 .

[8]  Ronald S. Fearing,et al.  Wing transmission for a micromechanical flying insect , 2000, Proceedings 2000 ICRA. Millennium Conference. IEEE International Conference on Robotics and Automation. Symposia Proceedings (Cat. No.00CH37065).

[9]  T. Shrout,et al.  Ultrahigh strain and piezoelectric behavior in relaxor based ferroelectric single crystals , 1997 .

[10]  Kenji Mori,et al.  Ultrasonic linear motor for a high precision X-Y stage , 1989, Proceedings., IEEE Ultrasonics Symposium,.

[11]  Kui Yao,et al.  Design and fabrication of a high performance multilayer piezoelectric actuator with bending deformation , 1999, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[12]  Francis C. Moon,et al.  Modal Sensors/Actuators , 1990 .

[13]  B. Pokines,et al.  A smart material microamplification mechanism fabricated using LIGA , 1998 .

[14]  J. G. Smits,et al.  The constituent equations of piezoelectric bimorphs , 1989, Proceedings., IEEE Ultrasonics Symposium,.

[15]  T. Bailey,et al.  Distributed Piezoelectric-Polymer Active Vibration Control of a Cantilever Beam , 1985 .

[16]  Ilhan A. Aksay,et al.  Electromechanical Behavior of PZT-Brass Unimorphs , 1999 .

[17]  E. Crawley,et al.  Use of piezoelectric actuators as elements of intelligent structures , 1987 .

[18]  Benson H. Tongue,et al.  Acoustic control using a self-sensing actuator , 1995 .

[19]  M. Weinberg.  Working equations for piezoelectric actuators and sensors , 1999 .

[20]  Benson H. Tongue,et al.  A Method for Determining the Optimal Location of a Distributed Sensor/Actuator , 1994 .

[21]  A. Pisano,et al.  Modeling and optimal design of piezoelectric cantilever microactuators , 1997 .

[22]  C. K. Lee,et al.  Piezoelectric modal sensor/actuator pairs for critical active damping vibration control , 1991 .

[23]  Ping Li,et al.  Image resolution improvement by swing CCD array imager in two dimensions and its signal processing , 1994, Other Conferences.

[24]  Sung Kyu Ha,et al.  ANALYSIS OF A PIEZOELECTRIC MULTIMORPH IN EXTENSIONAL AND FLEXURAL MOTIONS , 2002 .