Improving electrical characteristics of W/HfO2/In0.53Ga0.47As gate stacks by altering deposition techniques
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H. Iwai | N. Sugii | A. Nishiyama | P. Ahmet | K. Kakushima | Yueh-Chin Lin | E. Chang | K. Natori | K. Tsutsui | T. Hattori | D. Zade | T. Kanda