论文信息 - Piezoelectric micromachined transducers (PMUT's) based on PZT thin films

Piezoelectric micromachined transducers (PMUT's) based on PZT thin films

Test structures for piezoelectric micromachined ultrasonic transducers have been fabricated and investigated. The basic element consisted of a silicon membrane coated with a 2 /spl mu/m thick (100)-textured Pb(Zr,Ti)O/sub 3/ (PZT) thin film deposited by sol-gel techniques. SOI wavers have been applied to obtain a good definition of the silicon part of the membrane. Test devices have been characterized in air and in an insulating liquid.

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