Contact force-controlled SPM system design with fuzzy controller

This research applied both the traditional PI (Proportion and Integration) compensator and the PD (Proportion and Derivation) type fuzzy controller for a ccontact force-controlled Scanning Probe Microscope (SPM) system design. In addition, the actuator hysteresis effect was taken into consideration. It can be seen that the system performance obtained by the proposed fuzzy controller was much better, especially in eliminating the actuator hysteresis effect. This improvement has been verified by MATLAB simulation and practical implementation of a surface profiler.

[1]  Direct Torque Control of a Permanent Magnet Synchronous Motor with Pulse Width Modulation using Fuzzy Logic , 2007 .

[2]  Teodor Gotszalk,et al.  Microfabricated cantilever with metallic tip for electrostatic and capacitance microscopy and its application to investigation of semiconductor devices , 2004 .

[3]  Stuart T. Smith,et al.  A controlled-force stylus displacement probe , 1996 .

[4]  Greg Haugstad,et al.  Mechanisms of dynamic force microscopy on polyvinyl alcohol: region-specific non-contact and intermittent contact regimes , 1999 .

[5]  Derek G. Chetwynd,et al.  Improvement of the fidelity of surface measurement by active damping control , 1993 .

[6]  P. Rajesh Kumar,et al.  Fuzzy modelling for discrimination and merit factor of radar signals for range resolution , 2007 .

[7]  Teodor Gotszalk,et al.  Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy , 1998 .

[8]  Jium-Ming Lin,et al.  Profiler design with multi-sensor data fusion methods , 2007, SICE Annual Conference 2007.

[9]  Petrisor Anca,et al.  Conventional control and fuzzy control algorithms for shape memory alloy based tendons robotic structure , 2008 .

[10]  V. V. Prokhorov,et al.  Probe-surface interaction mapping in amplitude modulation atomic force microscopy by integrating amplitude-distance and amplitude-frequency curves , 2007 .

[11]  J. Bennett,et al.  Stylus profiling instrument for measuring statistical properties of smooth optical surfaces. , 1981, Applied optics.

[12]  Sidney R. Cohen,et al.  Force microscopy with a bidirectional capacitance sensor , 1990 .

[13]  Stuart T. Smith,et al.  Signal fidelity and tracking force in stylus profilometry , 1992 .