1/spl times/N/sup 2/ wavelength-selective switch with two cross-scanning one-axis analog micromirror arrays in a 4-f optical system

A new high-port-count wavelength-selective switch (WSS) has been realized using two cross-scanning one-axis analog micromirror arrays in a 4-f optical system. The number of output ports is increased from N to N/sup 2/, where N is the maximum linear port count limited by optical diffraction. Using surface-micromachined micromirrors with hidden vertical comb drives, large scan angles (>/spl plusmn/5/spl deg/ mechanical), low drive voltages (7 V), and high fill factors (> 96.25%) are achieved for both scanning mirrors. Experimental results for WSS are demonstrated using both two-dimensional (2-D) array of discrete collimators and monolithic 2-D collimator array. A fiber-to-fiber insertion loss ranging from 6 to 18 dB and a switching time of <700 /spl mu/s have been achieved.

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