0.25-um x-ray mask repair with focused ion beams

A focused ion beam system has been developed to repair 0.25 micrometers proximity print X-ray masks. The system is distinguished from a 0.5 micrometers mask repair tool with the addition of a Micrion designed column, differential laser interferometry, thermal management, and gold deposition hardware. These subsystems contribute to the overall tool performance so that the defects can be located, imaged and repaired to industry specifications. We discuss the functionality of the repair tool and present results from inspection and repair of actual masks.