High resolution tip-tilt positioning system for a next generation MLL-based x-ray microscope

Multilayer Laue lenses (MLLs) are x-ray focusing optics with the potential to focus hard x-rays down to a single nanometer level. In order to achieve point focus, an MLL microscope needs to have the capability to perform tip-tilt motion of MLL optics and to hold the angular position for an extended period of time. In this work, we present a 2D tip-tilt system that can achieve an angular resolution of over 100 microdegree with a working range of 4°, by utilizing a combination of laser interferometer and mini retroreflector. The linear dimensions of the developed system are about 30 mm in all directions, and the thermal dissipation of the system during operation is negligible. Compact design and high angular resolution make the developed system suitable for MLL optics alignment in the next generation of MLL-based x-ray microscopes.

[1]  S Kalbfleisch,et al.  Pushing the limits: an instrument for hard X-ray imaging below 20 nm. , 2015, Journal of synchrotron radiation.

[2]  Nathalie Bouet,et al.  Hard x-ray nanofocusing by multilayer Laue lenses , 2014 .

[3]  F. Wittwer,et al.  Improved tungsten nanofabrication for hard X-ray zone plates , 2016 .

[4]  S. Kalbfleisch,et al.  Sub-10 nm beam confinement by X-ray waveguides: design, fabrication and characterization of optical properties , 2012, Journal of synchrotron radiation.

[5]  Elina Färm,et al.  Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime. , 2011, Optics express.

[6]  Ian McNulty,et al.  Interlaced zone plate optics for hard X-ray imaging in the 10 nm range , 2017, Scientific Reports.

[7]  Christian G. Schroer,et al.  Full-field X-ray microscopy with crossed partial multilayer Laue lenses. , 2014, Optics express.

[8]  T. Ishikawa,et al.  Breaking the 10 nm barrier in hard-X-ray focusing , 2010 .

[9]  A. Sakdinawat,et al.  Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics , 2014, Nature Communications.

[10]  Nathalie Bouet,et al.  Development and characterization of monolithic multilayer Laue lens nanofocusing optics , 2016 .

[11]  Julio Cesar da Silva,et al.  Efficient concentration of high-energy x-rays for diffraction-limited imaging resolution , 2017 .

[12]  Li Li,et al.  11 nm hard X-ray focus from a large-aperture multilayer Laue lens , 2013, Scientific Reports.

[13]  Evgeny Nazaretski,et al.  Optomechanical Design of a Multilayer Laue Lens Test Bed for 10-nm Focusing of Hard X-rays , 2013 .

[14]  Y S Chu,et al.  Design and performance of an X-ray scanning microscope at the Hard X-ray Nanoprobe beamline of NSLS-II. , 2017, Journal of synchrotron radiation.

[15]  S. Marchesini,et al.  Chemical composition mapping with nanometre resolution by soft X-ray microscopy , 2014, Nature Photonics.

[16]  A Stein,et al.  Using compound kinoform hard-x-ray lenses to exceed the critical angle limit. , 2007, Physical review letters.

[17]  Nathalie Bouet,et al.  Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses. , 2017, Optics express.

[18]  W. Chao,et al.  Real space soft x-ray imaging at 10 nm spatial resolution. , 2012, Optics express.

[19]  Jörg Maser,et al.  Multilayer Laue Lens: A Brief History and Current Status , 2016 .

[20]  Li Li,et al.  Multimodality hard-x-ray imaging of a chromosome with nanoscale spatial resolution , 2016, Scientific Reports.

[21]  Andreas Leson,et al.  Ptychography with multilayer Laue lenses. , 2014, Journal of synchrotron radiation.

[22]  O. Bunk,et al.  X-ray ptychographic computed tomography at 16 nm isotropic 3D resolution , 2014, Scientific Reports.

[23]  Jungdae Kim,et al.  Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope. , 2013, The Review of scientific instruments.

[24]  Tim Salditt,et al.  Hard x-ray nanobeam characterization by coherent diffraction microscopy , 2010 .

[25]  Anton Barty,et al.  High numerical aperture multilayer Laue lenses , 2015, Scientific Reports.

[26]  Kazuto Yamauchi,et al.  50-nm-resolution full-field X-ray microscope without chromatic aberration using total-reflection imaging mirrors , 2017, Scientific Reports.