论文信息 - DLC Film Formation Technologies by Applying Pulse Voltage Coupled with RF Voltage to Complicated 3-dimensional Substrates and Industrial Application - 字舞流文

DLC Film Formation Technologies by Applying Pulse Voltage Coupled with RF Voltage to Complicated 3-dimensional Substrates and Industrial Application

Yasuo Suzuki | Yasuo Suzuki

[1] J. R. Conrad,et al. Plasma source ion-implantation technique for surface modification of materials , 1987 .