A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures
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Jacob K. White | X. Cai | Stephen D. Senturia | P. Osterberg | H. Yie | J. Gilbert | S. Senturia | P. Osterberg | Xuejun Cai | H. Yie | J. Gilbert
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