Design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror

This paper describes the design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror (DM). An analytical model was employed to optimize the DM's structure. The fabrication techniques for PZT thick film actuators were also experimentally explored, including the bonding of bulk PZT ceramics and a silicon wafer by epoxy resin, and the thinning of the bulk PZT ceramics using a wet-etching method. A 10 × 10 array of 1.75 mm × 1.75 mm PZT thick film actuators was successfully fabricated. The PZT actuators showed a stroke of about 4.5 µm at 100 V. When a 36 µm thick silicon membrane mirror was assembled, the measured mirror deflection at 100 V was approximately 3.8 µm. The assembled DM showed an operating frequency bandwidth of 21 kHz and an influence function of approximately 30%. The displacement hysteresis was greatly eliminated by using the method of staying on the same segment.

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