论文信息 - Epitaxial Growth of AlN on (0001) Sapphire: Assessment of HVPE Process by a Design of Experiments Approach - 字舞流文

Epitaxial Growth of AlN on (0001) Sapphire: Assessment of HVPE Process by a Design of Experiments Approach

R. Boichot | M. Pons | G. Giusti | F. Mercier | M. Chubarov | F. Baillet | Danying Chen | Thomas E. Coughlan