Miniaturized single-crystal silicon cantilevers for scanning force microscopy
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Ute Drechsler | Peter Vettiger | Michel Despont | Bart W. Hoogenboom | M. Despont | U. Drechsler | P. Vettiger | H. Hug | B. Hoogenboom | Jie Yang | P. Frederix | A. Engel | S. Martin | Hans J. Hug | S. Martin | Andreas Engel | Jie Yang | P. L T M Frederix
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