Plasma Enhanced atomic layer deposited amorphous gallium oxide thin films using novel trimethyl[N-(2-methoxyethyl)-2-methylpropan-2-amine]gallium
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J. Lim | Wan-Ho Choi | Taehyun Hong | Jinsin Park | HyunKyung Lee | Su-Hwan Choi | J. Seok | J. Park