Estimating the Process Yield of Multiple Characteristics With One-Sided Specifications

This paper proposes a procedure for estimating the process yield of multiple characteristics with one-sided specifications in a manufacturing process. The proposed process yield indices can be applied for a multivariate normality data or a multivariate non-normality data. These indices provide an exact measure of the overall process yield. Also, the approximate lower confidence bound for the true process yield is presented. Three examples are used to demonstrate the performance of the proposed approach. The results show that our procedure is an effective approach.

[1]  Babak Abbasi,et al.  Multivariate nonnormal process capability analysis , 2009 .

[2]  Hamid Shahriari,et al.  A New Multivariate Process Capability Vector , 2009 .

[3]  D. Owen,et al.  On the distributions of the estimated process capability indices , 1989 .

[4]  Fu-Kwun Wang,et al.  Comparison of Three Multivariate Process Capability Indices , 2000 .

[5]  W. L. Pearn,et al.  Sample size determination for production yield estimation with multiple independent process characteristics , 2009, Eur. J. Oper. Res..

[6]  D. Cox,et al.  An Analysis of Transformations , 1964 .

[7]  N. L. Johnson,et al.  Distributional and Inferential Properties of Process Capability Indices , 1992 .

[8]  Fu-Kwun Wang,et al.  A General Procedure for Process Yield With Multiple Characteristics , 2010, IEEE Transactions on Semiconductor Manufacturing.

[9]  James W. Liddy,et al.  A note on multivariate capability indices , 1993 .

[10]  Victor E. Kane,et al.  Process Capability Indices , 1986 .

[11]  Wen Lea Pearn,et al.  Measuring manufacturing capability for couplers and wavelength division multiplexers , 2005 .

[12]  K. Mehrotra,et al.  Tests for Univariate and Multivariate Normality. , 1976 .

[13]  Fred A. Spiring,et al.  A multivariate measure of process capability , 1991 .

[14]  K. Mardia.  9 Tests of unvariate and multivariate normality , 1980 .

[15]  J. Edward Jackson,et al.  Principal Components and Factor Analysis: Part I - Principal Components , 1980 .

[16]  T. Du,et al.  Using principal component analysis in process performance for multivariate data , 2000 .

[17]  I. Jolliffe.  Principal Component Analysis and Factor Analysis , 1986 .