A study of a high-pressure micropump for integrated chemical analysing systems

Abstract To fabricate a high-pressure micropump, a diaphragm-type pump using passive check valves has been studied and a novel micro check valve developed. It has a simple structure consisting of a silicone rubber float and a through-hole. The reverse flow resistance of this valve is about 10 atm min/μl and the forward-to-reverse flow ratio is about 1000 at an applied pressure of 0.5 atm. This valve can be applied to the high-pressure micropump for pressures up to at least 1 atm.

[1]  A. Grisel,et al.  A flow injection analysis system with glass-bonded ISFETs for the simultaneous detection of calcium and potassium ions and pH , 1991 .

[2]  A. Manz,et al.  Design of an open-tubular column liquid chromatograph using silicon chip technology , 1990 .

[3]  H. Lintel,et al.  A piezoelectric micropump based on micromachining of silicon , 1988 .

[4]  M. Esashi,et al.  Smallest dead volume microvalves for integrated chemical analyzing systems , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[5]  B. Hok,et al.  A silicon self-aligned non-reverse valve , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[6]  Axel Richter,et al.  Electrohydrodynamic pumping and flow measurement , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[7]  J. Fluitman,et al.  A thermopneumatic micropump based on micro-engineering techniques , 1990 .