论文信息 - Wafer-scale nanofabrication of sub-100 nm arrays by deep-UV displacement Talbot lithography - 字舞流文

Wafer-scale nanofabrication of sub-100 nm arrays by deep-UV displacement Talbot lithography

V. J. Gómez | I. Maximov | S. Lehmann | Víctor Jesús Gómez Hernández | M. Graczyk | R. Jafari Jam | R. J. Jam | Mariusz Graczyk