Matching in-situ and ex-situ recorded stress gradients in an AlxGa1 − xN Heterostructure: Complementary wafer curvature analyses in time and space
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B. Sartory | W. Ecker | J. Keckes | J. Zechner | C. Ostermaier | I. Daumiller | M. Reisinger | M. Tomberger