论文信息 - Thermal Atomic Layer Etching of MoS2 Using MoF6 and H2O - 字舞流文

Thermal Atomic Layer Etching of MoS2 Using MoF6 and H2O

E. Graugnard | A. Mane | J. Elam | Steven Letourneau | S. Hues | Devika Choudhury | Jake Soares