Applying the miniaturization technologies for biosensor design.

Microengineering technologies give us some opportunities in developing high-tech sensing systems that operate with low volumes of samples, integrates one or more laboratory functions on a single substrate, and enables automation. These millimetric sized devices can be produced for only a few dollars, which makes them promising candidates for mass-production. Besides electron beam lithography, stencil lithography, nano-imprint lithography or dip pen lithography, basic photolithography is the technique which is extensively used for the design of microengineered sensing systems. This technique has some advantages such as easy-to-manufacture, do not require expensive instrumentation, and allow creation of lower micron-sized patterns. In this review, it has been focused on three different type of microengineered sensing devices which are developed using micro/nano-patterning techniques, microfluidic technology, and microelectromechanics system based technology.

[1]  Dachao Li,et al.  A MEMS Dielectric Affinity Glucose Biosensor , 2014, Journal of Microelectromechanical Systems.

[2]  Torsten Gerlach,et al.  Working principle and performance of the dynamic micropump , 1995 .

[3]  A. J. Gandolfi,et al.  Precision-cut tissue chips as an in vitro toxicology system. , 2007, Toxicology in vitro : an international journal published in association with BIBRA.

[4]  He Zhang,et al.  Aptamer-based microfluidic beads array sensor for simultaneous detection of multiple analytes employing multienzyme-linked nanoparticle amplification and quantum dots labels. , 2014, Biosensors & bioelectronics.

[5]  Yafeng Wu,et al.  Signal amplification cytosensor for evaluation of drug-induced cancer cell apoptosis. , 2012, Analytical chemistry.

[6]  Jun Yang,et al.  An electrochemical Lab-on-a-CD system for parallel whole blood analysis. , 2013, Lab on a chip.

[7]  Alberto Escarpa,et al.  Enzyme-based microfluidic chip coupled to graphene electrodes for the detection of D-amino acid enantiomer-biomarkers. , 2015, Analytical chemistry.

[8]  Bin Su,et al.  A novel biosensor array with a wheel-like pattern for glucose, lactate and choline based on electrochemiluminescence imaging. , 2014, The Analyst.

[9]  Tomoji Kawai,et al.  Novel DNA nano-patterning design method utilizing poly-L-lysine patterning by nanoimprint lithography. , 2006, Journal of nanoscience and nanotechnology.

[10]  T. Yao,et al.  Amperometric enzyme-immunosensor based on ferrocene-mediated amplification. , 1987, Biosensors.

[11]  Takumi Sannomiya,et al.  Metallic nanodot arrays by stencil lithography for plasmonic biosensing applications. , 2011, ACS nano.

[12]  B. E. Alaca,et al.  A Magnetically Actuated Resonant Mass Sensor With Integrated Optical Readout , 2008, IEEE Photonics Technology Letters.

[13]  Won-Gun Koh,et al.  Fabrication of hydrogel-micropatterned nanofibers for highly sensitive microarray-based immunosensors having additional enzyme-based sensing capability , 2011 .

[14]  Zhe Liang,et al.  Microfluidic amperometric sensor for analysis of nitric oxide in whole blood. , 2013, Analytical chemistry.

[15]  Zimple Matharu,et al.  Detecting Transforming Growth Factor-β Release from Liver Cells Using an Aptasensor Integrated with Microfluidics , 2014, Analytical chemistry.

[16]  Anders S Hansen,et al.  High-throughput microfluidics to control and measure signaling dynamics in single yeast cells , 2015, Nature Protocols.

[17]  Yen Pei-Wen,et al.  A device design of an integrated CMOS poly-silicon biosensor-on-chip to enhance performance of biomolecular analytes in serum samples. , 2014, Biosensors & bioelectronics.

[18]  Vincent Thomy,et al.  SPR biosensing coupled to a digital microfluidic microstreaming system. , 2007, Biosensors & bioelectronics.

[19]  Inkyu Park,et al.  Nanotextured Polymer Substrate for Flexible and Mechanically Robust Metal Electrodes by Nanoimprint Lithography. , 2015, ACS applied materials & interfaces.

[20]  Xiao Zhi,et al.  A novel HBV genotypes detecting system combined with microfluidic chip, loop-mediated isothermal amplification and GMR sensors. , 2014, Biosensors & bioelectronics.

[21]  Seung-Woo Lee,et al.  Highly sensitive biosensing using arrays of plasmonic Au nanodisks realized by nanoimprint lithography. , 2011, ACS nano.

[22]  Tao Wang,et al.  A giant magnetoimpedance-based biosensor for sensitive detection of Escherichia coli O157:H7 , 2015, Biomedical microdevices.

[23]  Rohan T Ranasinghe,et al.  Ultrarapid generation of femtoliter microfluidic droplets for single-molecule-counting immunoassays. , 2013, ACS nano.

[24]  Qian Wang,et al.  A microarray MEMS device for biolistic delivery of vaccine and drug powders , 2015, Human vaccines & immunotherapeutics.

[25]  Teodor Veres,et al.  All-thermoplastic nanoplasmonic microfluidic device for transmission SPR biosensing. , 2013, Lab on a chip.

[26]  Vimal Vijayan,et al.  Use of recombinant oestrogen binding protein for the electrochemical detection of oestrogen. , 2015, Biosensors & bioelectronics.

[27]  Jin-Won Park,et al.  Preparation of micropatterned hydrogel substrate via surface graft polymerization combined with photolithography for biosensor application , 2008 .

[28]  Sebastian J Maerkl,et al.  A 1024-sample serum analyzer chip for cancer diagnostics. , 2014, Lab on a chip.

[29]  L. Jay Guo,et al.  Recent progress in nanoimprint technology and its applications , 2004 .

[30]  K. Hellenäs,et al.  Sensor chip preparation and assay construction for immunobiosensor determination of beta-agonists and hormones. , 2001, The Analyst.

[31]  Arnab Mukherjee,et al.  A multiplexed microfluidic platform for rapid antibiotic susceptibility testing. , 2013, Biosensors & bioelectronics.

[32]  Juan Hernández-Cordero,et al.  An optopneumatic piston for microfluidics. , 2015, Lab on a chip.

[33]  Muthukumaran Packirisamy,et al.  Integration of gold nanoparticles in PDMS microfluidics for lab-on-a-chip plasmonic biosensing of growth hormones. , 2013, Biosensors & bioelectronics.

[34]  T. Veres,et al.  Thermoplastic elastomers for microfluidics: towards a high-throughput fabrication method of multilayered microfluidic devices. , 2011, Lab on a chip.

[35]  D. Chiu,et al.  Selective encapsulation of single cells and subcellular organelles into picoliter- and femtoliter-volume droplets. , 2005, Analytical chemistry.

[36]  P. Vlachos,et al.  Three-dimensional microfluidic collagen hydrogels for investigating flow-mediated tumor-endothelial signaling and vascular organization. , 2014, Tissue engineering. Part C, Methods.

[37]  David Erickson,et al.  Label-free electrochemical monitoring of vasopressin in aptamer-based microfluidic biosensors. , 2013, Analytica chimica acta.

[38]  Haijun Li,et al.  MEMS-based multiphoton endomicroscope for repetitive imaging of mouse colon. , 2015, Biomedical optics express.

[39]  Jianhua Zhou,et al.  Antibody modified gold nano-mushroom arrays for rapid detection of alpha-fetoprotein. , 2015, Biosensors & bioelectronics.

[40]  A. E. Cetin,et al.  Lensfree optofluidic plasmonic sensor for real-time and label-free monitoring of molecular binding events over a wide field-of-view , 2014, Scientific Reports.

[41]  Hassan M E Azzazy,et al.  Power-free chip enzyme immunoassay for detection of prostate specific antigen (PSA) in serum. , 2013, Biosensors & bioelectronics.

[42]  Steve Semancik,et al.  Multi-resonant plasmonic nanodome arrays for label-free biosensing applications. , 2013, Nanoscale.

[43]  Ho Won Jang,et al.  Giant Piezoelectricity on Si for Hyperactive MEMS , 2011, Science.

[44]  K. C. Emregül,et al.  Alginate and alginate-titanium dioxide nanocomposite as electrode materials for anti-myelin basic protein immunosensing , 2014 .

[45]  Arnan Mitchell,et al.  Microfluidic platform for separation and extraction of plasma from whole blood using dielectrophoresis. , 2015, Biomicrofluidics.

[46]  E. Sheldon,et al.  Picogram quantitation of total DNA using DNA-binding proteins in a silicon sensor-based system. , 1990, Analytical biochemistry.

[47]  C. L. Rice,et al.  Electrokinetic Flow in a Narrow Cylindrical Capillary , 1965 .

[48]  Qing Zhou,et al.  Influence of flow rule and calibration approach on plasticity characterization of DP780 steel sheets using Hill48 model , 2014 .

[49]  Jing-Juan Xu,et al.  Glucose microfluidic biosensors based on reversible enzyme immobilization on photopatterned stimuli-responsive polymer. , 2013, Biosensors & bioelectronics.

[50]  Yael Zilberman,et al.  Microfluidic optoelectronic sensor for salivary diagnostics of stomach cancer. , 2015, Biosensors & bioelectronics.

[51]  G. Whitesides,et al.  Patterning proteins and cells using soft lithography. , 1999, Biomaterials.

[52]  Pooja Sabhachandani,et al.  Approaching near real-time biosensing: microfluidic microsphere based biosensor for real-time analyte detection. , 2015, Biosensors & bioelectronics.

[53]  Shih-Cheng Yen,et al.  Progress of Flexible Electronics in Neural Interfacing – A Self‐Adaptive Non‐Invasive Neural Ribbon Electrode for Small Nerves Recording , 2016, Advanced materials.

[54]  Jin Qi,et al.  MEMS-based system and image processing strategy for epiretinal prosthesis. , 2015, Bio-medical materials and engineering.

[55]  Miko Elwenspoek,et al.  Resistless patterning of sub-micron structures by evaporation through nanostencils , 2000 .

[56]  Chad A Mirkin,et al.  A bio-barcode assay for on-chip attomolar-sensitivity protein detection. , 2006, Lab on a chip.

[57]  D. J. Harrison,et al.  Planar chips technology for miniaturization and integration of separation techniques into monitoring systems. Capillary electrophoresis on a chip , 1992 .

[58]  Euisik Yoon,et al.  A high-throughput photodynamic therapy screening platform with on-chip control of multiple microenvironmental factors. , 2014, Lab on a chip.

[59]  Tatsuro Endo,et al.  Reflectometric detection of influenza virus in human saliva using nanoimprint lithography-based flexible two-dimensional photonic crystal biosensor , 2010 .

[60]  Song Zhang,et al.  Visual and high-throughput detection of cancer cells using a graphene oxide-based FRET aptasensing microfluidic chip. , 2012, Lab on a chip.

[61]  Arantxa Uranga,et al.  Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography. , 2008, Small.

[62]  Niclas Roxhed,et al.  Integrating MEMS and ICs , 2015 .

[63]  Gwo-Bin Lee,et al.  An integrated microfluidic system for rapid diagnosis of dengue virus infection , 2009, Biosensors and Bioelectronics.

[64]  J. Brugger,et al.  Metallic nanowires by full wafer stencil lithography. , 2008, Nano letters.

[65]  Mergen H. Ghayesh,et al.  Size-dependent electro-elasto-mechanics of MEMS with initially curved deformable electrodes , 2015 .

[66]  C-T Lin,et al.  A CMOS wireless biomolecular sensing system-on-chip based on polysilicon nanowire technology. , 2013, Lab on a chip.

[67]  W. Bentley,et al.  In situ generation of pH gradients in microfluidic devices for biofabrication of freestanding, semi-permeable chitosan membranes. , 2010, Lab on a chip.

[68]  Katrin Sidler,et al.  Etching of sub-micrometer structures through Stencil , 2008 .

[69]  Alp Artar,et al.  High-throughput nanofabrication of infrared plasmonic nanoantenna arrays for vibrational nanospectroscopy. , 2010, Nano letters.

[70]  Stephen Ducharme,et al.  Fabrication of ferroelectric polymer nanostructures on flexible substrates by soft-mold reverse nanoimprint lithography. , 2016, Nanotechnology.

[71]  Heather E Fleming,et al.  Micropatterned coculture of primary human hepatocytes and supportive cells for the study of hepatotropic pathogens , 2015, Nature Protocols.

[72]  Mohammad R K Mofrad,et al.  Directional migration and differentiation of neural stem cells within three-dimensional microenvironments. , 2015, Integrative biology : quantitative biosciences from nano to macro.

[73]  Song Zhang,et al.  A real-time microfluidic multiplex electrochemical loop-mediated isothermal amplification chip for differentiating bacteria. , 2014, Biosensors & bioelectronics.

[74]  Christian Joachim,et al.  Wetting studies on Au nanowires deposited through nanostencil masks , 2007 .

[75]  Hakan Urey,et al.  MEMS biosensor for detection of Hepatitis A and C viruses in serum. , 2011, Biosensors & bioelectronics.

[76]  Gwo-Bin Lee,et al.  Rapid detection and typing of live bacteria from human joint fluid samples by utilizing an integrated microfluidic system. , 2015, Biosensors & bioelectronics.

[77]  Anna Pohl,et al.  Real-time monitoring of calcium carbonate and cationic peptide deposition on carboxylate-SAM using a microfluidic SAW biosensor , 2014, Beilstein journal of nanotechnology.

[78]  Jae Hee Jung,et al.  Fast and continuous microorganism detection using aptamer-conjugated fluorescent nanoparticles on an optofluidic platform. , 2015, Biosensors & bioelectronics.

[79]  J. Bausells,et al.  Localized Ion Implantation Through Micro/Nanostencil Masks , 2011, IEEE Transactions on Nanotechnology.

[80]  Mehmet Toner,et al.  A microfluidic device for practical label-free CD4(+) T cell counting of HIV-infected subjects. , 2007, Lab on a chip.

[81]  H. Altug,et al.  An optofluidic nanoplasmonic biosensor for direct detection of live viruses from biological media. , 2010, Nano letters.

[82]  Pascal Colpo,et al.  A printed nanolitre-scale bacterial sensor array. , 2011, Lab on a chip.

[83]  Yu Wang,et al.  Sensitive electrochemical aptamer cytosensor for highly specific detection of cancer cells based on the hybrid nanoelectrocatalysts and enzyme for signal amplification. , 2016, Biosensors & bioelectronics.

[84]  I. Lazar,et al.  Microfabricated devices: A new sample introduction approach to mass spectrometry. , 2006, Mass spectrometry reviews.

[85]  Florian Kehl,et al.  Introduction of an angle interrogated, MEMS-based, optical waveguide grating system for label-free biosensing , 2016 .

[86]  Thomas Thundat,et al.  Piezotransistive transduction of femtoscale displacement for photoacoustic spectroscopy , 2015, Nature Communications.

[87]  Yi Zhang,et al.  A stacking flow immunoassay for the detection of dengue-specific immunoglobulins in salivary fluid. , 2015, Lab on a chip.

[88]  S. Thorslund,et al.  A fluidic device to study directional angiogenesis in complex tissue and organ culture models. , 2009, Lab on a chip.

[89]  M. Neil,et al.  Fluorescence-lifetime imaging of DNA-dye interactions within continuous-flow microfluidic systems. , 2007, Angewandte Chemie.

[90]  Uda Hashim,et al.  The utilization of SiNWs/AuNPs-modified indium tin oxide (ITO) in fabrication of electrochemical DNA sensor. , 2014, Materials science & engineering. C, Materials for biological applications.

[91]  Jaydev P. Desai,et al.  Design and fabrication of a flexible MEMS-based electro-mechanical sensor array for breast cancer diagnosis , 2015 .

[92]  Burak Derkus,et al.  Myelin basic protein immunosensor for multiple sclerosis detection based upon label-free electrochemical impedance spectroscopy. , 2013, Biosensors & bioelectronics.

[93]  Umesh Kumar Bhaskar,et al.  A flexoelectric microelectromechanical system on silicon. , 2016, Nature nanotechnology.

[94]  Gwo-Bin Lee,et al.  A suction-type microfluidic immunosensing chip for rapid detection of the dengue virus , 2011, Biomedical microdevices.

[95]  Kyung-A Hyun,et al.  Microfluidic flow fractionation device for label-free isolation of circulating tumor cells (CTCs) from breast cancer patients. , 2013, Biosensors & bioelectronics.

[96]  P. Umbanhowar,et al.  Monodisperse Emulsion Generation via Drop Break Off in a Coflowing Stream , 2000 .

[97]  XiuJun Li,et al.  A PDMS/paper/glass hybrid microfluidic biochip integrated with aptamer-functionalized graphene oxide nano-biosensors for one-step multiplexed pathogen detection. , 2013, Lab on a chip.

[98]  Francoise F Giguel,et al.  Micro-a-fluidics ELISA for Rapid CD4 Cell Count at the Point-of-Care , 2014, Scientific Reports.