论文信息 - The formation of SGOI structures with low dislocation density by a two-step oxidation and condensation method - 字舞流文

The formation of SGOI structures with low dislocation density by a two-step oxidation and condensation method

N. Sugiyama | S. Takagi | T. Tezuka | Y. Moriyama | S. Nakaharai | N. Hirashita | K. Usuda