Reflexions on the future of microsystems

The development of a new technology like microsystems is not only a technological step, but also a process of the society in correlations with many fields of our personal and social life. This paper has the intention of looking at the dynamics of microsystems in the field put up by technology, economy and society. The following are the three main questions: 1. What are the typical features of microsystems? Where are the advantages and drawbacks? 2. What is known about the microsystems market and its dynamics? Published market studies are critically reviewed. 3. What are the most important prerequisites for application? Four main topics are identified: availability of production, performance, reliability and cost.

[1]  H. Glosch,et al.  Thermal flow sensor for liquids and gases , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[2]  Wolfgang Kuehnel,et al.  A surface micromachined silicon accelerometer with on-chip detection circuitry , 1994 .

[3]  W. Lang,et al.  Silicon microstructuring technology , 1996 .

[4]  C. Hierold,et al.  Implantable low power integrated pressure sensor system for minimal invasive telemetric patient monitoring , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[5]  J. Marek Silicon Microsystems for Automotive Applications , 1997, 27th European Solid-State Device Research Conference.

[6]  Hiroyuki Fujita,et al.  Future of actuators and microsystems , 1996 .

[7]  Janusz Bryzek,et al.  Impact of MEMS technology on society , 1996 .

[8]  B. Courtois,et al.  Microsystem prototyping: from the idea to the foundry via a continuous design flow , 1996 .