Silicon-silicon anodic bonding process with embedded glass

This paper reports a silicon-silicon anodic bonding process based on embedded glass. We successfully embedded glass into patterned silicon groove by fusion treatment and bonded it with another silicon wafer by anodic bonding process. This process realizes the precise control of bonding pattern and the depth of the bonding gap without electrical connection between two silicon wafers. Tension test result shows that the bonding strength is over 7MPa-which is in accordance with normal anodic bonding process, so that the process can be used in a wide range of MEMS devices design.

[1]  S. Grigull,et al.  In situ investigation of ion drift processes in glass during anodic bonding , 1998 .

[2]  B. Puers,et al.  Characterization of the electrostatic bonding of silicon and Pyrex glass , 1995 .

[3]  J. Esteve,et al.  Cathodic Debond of Anodically Bonded Silicon to Glass Wafers , 1999 .

[4]  G. Wallis,et al.  Field Assisted Glass‐Metal Sealing , 1969 .

[5]  R. Knechtel.  Glass frit bonding: an universal technology for wafer level encapsulation and packaging , 2005 .

[6]  D. T. Wang,et al.  TECHNICAL NOTE: Chemical analysis of bonded and debonded silicon-glass interfaces , 2001 .

[7]  T. Eagar,et al.  Transient Liquid Phase Bonding , 1992 .

[8]  B. Wagner,et al.  Silicon-silicon anodic-bonding with intermediate glass layers using spin-on glasses , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[9]  B. Warren,et al.  X‐RAY DIFFRACTION STUDY OF SODA‐BORIC OXIDE GLASS * , 1938 .

[10]  T. R. Anthony.  Anodic bonding of imperfect surfaces , 1983 .

[11]  T. Suga,et al.  Low temperature direct bonding of silicon and silicon dioxide by the surface activation method , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[12]  M. Nese,et al.  Anodic bonding of silicon to silicon wafers coated with aluminium, silicon oxide, polysilicon or silicon nitride , 1993 .

[13]  Naofumi Yamada,et al.  Linear Thermal Expansion Coefficient of Silicon from 293 to 1000 K , 2004 .