Uncertainty on areal defect density measurements

This paper introduces an analysis of the uncertainty of the determination of the areal density of defects. Estimating the density of defects is a fundamental aspect of the study of laser induced damage. The proper accounting for the uncertainty in this measurement is also a seminal matter. This paper introduces two means of estimation of estimating the uncertainty, the so-called frequentist and Bayesian approaches. The paper concludes with a comparison of the results from the two methods.